Trident™ SST Spray Solvent Tools

Spray Solvent Tools for 75-200mm Substrates

The Trident Spray Solvent Tool (SST) is the next generation of batch-processing SSTs for Metal Lift-Off, Photoresist Strip, Polymer Removal and other demanding solvent based processes. Trident Spray Solvent Tool models are available for 75 to 200mm substrates — with one or two process chambers; two, four, six or eight heated chemical tanks; and a wide range of rotors. These systems include the proven Windows® 7-based Solaris™ controller as well as remote login, data logging, GEM/SECSII communications and reliability reporting.

Bottom line, Trident SSTs increase uptime and productivity while significantly reducing capital expense — with system pricing that is significantly lower than competitive spray solvent tools.

Key Features

  • One or two process chambers
  • Available for 75-200mm substrates
  • 2-, 4-, or 6- tank models
  • Wide range of rotors
  • Windows®7-based Solaris controller
  • Remote login
  • Data logging
  • GEM/SECSII communications

Major Benefits

  • Significantly lower operating expense
  • Reduced chemical consumption
  • Shorter process time
  • Fewer defects
  • Easier control and operation

Processes for Spray Solvent Tools

  • Metal Lift-Off
  • Resist Strip
  • Polymer Removal
  • Substrate Cleaning
  • Resist Developing

Trident SST Slideshow

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