Trident SST all caps

Advanced Spray Solvent Tools

For semiconductor batch processing

 

Next-generation SST
The Trident™ Spray Solvent Tools (SST) from ClassOne Technology are the next generation of batch-processing systems for metal lift-off, photoresist strip, polymer removal, and other solvent-based processes.

 

For substrates up to 200mm
Trident Spray Solvent Tool models are available for up to 200mm substrates — with two, four, or six heated chemical tanks; and a wide range of rotors. ClassOne can accommodate a range of wafer sizes, engineering rotors for most shapes and sizes. These systems include ClassOne’s proven Windows®10-based Solaris™ controller and provide remote login, data logging, GEM/SECSII communications, and reliability reporting.

 

opening and closing trident spray solvent tools

 

These spray solvent tools utilize precision spray nozzles to deliver a continuous, uniform shower of solvent or rinse water, which enhances process performance.

Trident SSTs increase productivity and uptime while significantly reducing cost of ownership — with system pricing that is significantly lower than competitive spray solvent tools.

 

Trident spray solvent tool system angle view

 

 

Key Features

  • 2-, 4-, or 6-tank models
  • Wide range of rotors
  • Windows®10-based Solaris controller
  • Remote login, data logging, and GEM/SECSII

 

Major Benefits

  • Significantly lower CoO
  • Reduced chemical consumption
  • Reduced defects
  • Shorter process time
  • Easier operation and control

 

 

 

Next-generation SST
The Trident™ Spray Solvent Tools (SST) from ClassOne Technology are the next generation of batch-processing systems for metal lift-off, photoresist strip, polymer removal, and other solvent-based processes.

 

For substrates up to 200mm
Trident Spray Solvent Tool models are available for up to 200mm substrates — with two, four, or six heated chemical tanks; and a wide range of rotors. ClassOne can accommodate a range of wafer sizes, engineering rotors for most shapes and sizes. These systems include ClassOne’s proven Windows®10-based Solaris™ controller and provide remote login, data logging, GEM/SECSII communications, and reliability reporting.

 

opening and closing trident spray solvent tools

 

These spray solvent tools utilize precision spray nozzles to deliver a continuous, uniform shower of solvent or rinse water, which enhances process performance.

Trident SSTs increase productivity and uptime while significantly reducing cost of ownership — with system pricing that is significantly lower than competitive spray solvent tools.

 

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