Solstice M8/M12/M16

Solstice Max Series platform scales from compact and low-volume to efficient high-volume production

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Key Benefits

M8 provides automated ECD and SP processing

M8 allows for all Solstice chamber solutions to be
configured

Fully extendable to M12/M16 in the future

Advanced control system for MES and ancillary
equipment integration

Dimensions

Solstice Max Series platform scales from compact and low-volume to efficient high-volume production

The M8/M12/M16 represents the complete xtendibility of the Max Series platform. These high volume tools make use of multiple quad frames sequenced together.
Each quad frame uses its independent robot to service chambers and shuttle wafers between adjacent quads or EFEM. Pass through stations that span the quads are accessible from both adjacent quads. This Platform allows for high volume processes with many identical chambers running in parallel.

The M8/M12/M16 platform can be integrated with customized EFEMs that meet fab needs. Up to 4 Load
ports, wafer scribe OCR (optical character ecognition),
alignment, and other features can be configured to an
EFEM that enables fabs to meet customer expectations. Importantly, an M4 that initially uses a single load port can be upgraded to use an EFEM in the field. The Max Series platform enables the Solstice to meet customer needs today and in the future with no compromise.

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