PRODUCTS
Products
We provide innovative new solutions for a range of applications on 3" to 8" substrates of many materials, including silicon, glass, sapphire, GaAs, GaN, Ge, InP and HgCdTe. We make electroplating tools for development and high-volume production, batch spray solvent processors, spin rinse dryers, process controllers and more...
Solstice™ S8
Electroplating Volume Production
For 75-200mm substrates
The S8 is the smart, affordable step up from wet bench to high-performance plating automation. It can dramatically increase throughput while boosting quality, uniformity, reliability and ROI for a broad range of processes.
- For plating, cleaning or etching
- Cassette-to-cassette automation
- Up to 75wph throughput
- 8-chamber process flexibility
- Thin or bonded substrates
- Transparent or opaque substrates
Solstice™ S4
Electroplating Production System
For 75-200mm substrates
For some users, the S4 can provide an even lower-cost entry point into mid-level automated plating production. This tool still provides many S8 capabilities, but with fewer chambers, for a smaller footprint and lower cost.
- For plating, cleaning or etching
- Cassette-to-cassette automation
- Up to 4 chambers
- Smaller footprint, lower cost
- To replace older plating systems
Solstice™ LT
Electroplating Developing System
For 75-200mm substrates
With manual wafer load and unload, the Solstice LT provides for easy, high-performance process development. It features automated recipe execution and the same chambers and controls as the Model S8, enabling easy scaling.
- For plating, cleaning or etching
- 2 ECD or 1 ECD & 1 prewet chamber
- 1 or 2 chemistries
- Full compatibility with S4 and S8
- Smallest Footprint
Trident™ SST
Spray Solvent Tools
For 75-200mm substrates
Utilizing Deluge technology, these next-generation batch-processing SSTs deliver a continuous, uniform cascade of solvent or rinse water without using spray nozzles, which dramatically enhances process performance.
- Cuts chemical consumption
- Shortens process time
- Reduces defects
- Increases uptime/productivity
- Reduces capital expense
Trident™ SRD
Spin-Rinse-Dryer Tools
For 75-200mm substrates
These easy-to-use, front-loading SRDs efficiently and rapidly remove residual chemicals after wet processing and dry the substrates completely without leaving water spots.
- Full touch-screen control
- Single or double-stack models
- DI water recirculation
- N2 saver
- Overtemp protection
- Data Logger
