Solstice M4

Fully automated single wafer ≤ 300mm processing in a compact footprint

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Key Benefits

M4 provides automated ECD and SP processing

M4 allows for all Solstice chamber solutions to be configured

Fully extendable to M8/M12/M16 in the future

M4 can be configured with a 5th position for support chambers

Dimensions

Fully automated single wafer ≤ 300mm processing in a compact footprint

The Solstice M4 system makes use of a single 4 chamber frame. It can be configured with a full EFEM for multiple cassette or FOUP load ports or a single load port. Configured with the single load port, the M4 system provides an unprecedented, compact tool for fully automated processing. This M4 can be used for a full bumping process (prewet/SRD, copper, nickel, tin silver) or other plating and surface prep processes. A fifth chamber can be added for increased capability, and it can be removed or repositioned when the the tool is extended to an M8/M12/M16.

The M4’s frame uses integrated adjacent electrical pods that allow for easy repair and maintenance. A single radial robot with dual end effectors allows for efficient wafer automation between FOUP or cassette and chambers. Additionally, an easily accessed fluidics bay below each pair of chambers contains all the wetted components like tanks, pumps, filters, heaters, and valves in a maintainable layout. Facilities can be adapted for “out-the-side” or “out-the-bottom” fabs.

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