Solstice M2

Manually loaded tool for process development, and low volume R&D applications

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Key Benefits

M2 can be extended with 4 or 6 chambers

Each M2 can be configured with 2 chemically compatible processes

All Solstice chamber types can be configured within
the M2

Dimensions

Manually loaded tool for process development, and low volume R&D applications

The M2 platform provides low volume and R&D customers the ability to manually run up to 300mm wafer sizes in a compact system. Because the chambers are identical to the high-volume automated system, scaling to production is straightforward and easy.

The Solstice M2 tool is a semiautomated manual loaded tool. An operator will use the integrated wafer vacuum wand to load and unload wafers into the rotors. The chamber automation, fluidics, chamber design, and recipe is identical to the fully automated tools. The chambers within the M2 can be any pair of chemically compatible chambers. M2’s can be sequenced together allowing for 4 or 6 chamber systems. The Max Series platform makes use of a modular frame with integrated adjacent electrical pods that allows for easy repair and maintenance. Additionally, an easily accessed fluidics bay contains all the wetted components like tanks, pumps, filters, heaters, valves in a maintainable layout.

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