The Solstice M2 tool is a semiautomated manual loaded tool. An operator will use the integrated wafer vacuum wand to load and unload wafers into the rotors. The chamber automation, fluidics, chamber design, and recipe is identical to the fully automated tools. The chambers within the M2 can be any pair of chemically compatible chambers. M2’s can be sequenced together allowing for 4 or 6 chamber systems. The Max Series platform makes use of a modular frame with integrated adjacent electrical pods that allows for easy repair and maintenance. Additionally, an easily accessed fluidics bay contains all the wetted components like tanks, pumps, filters, heaters, valves in a maintainable layout.