Trident SST
Advanced Spray Solvent Tools
For semiconductor batch processing
Next-generation SST
The Trident™ Spray Solvent Tools (SST) from ClassOne Technology are the next generation of batch-processing systems for metal lift-off, photoresist strip, polymer removal, and other solvent-based processes.
For substrates up to 200mm
Trident Spray Solvent Tool models are available for up to 200mm substrates — with two, four, or six heated chemical tanks; and a wide range of rotors. ClassOne can accommodate a range of wafer sizes, engineering rotors for most shapes and sizes. These systems include ClassOne’s proven Windows®10-based Solaris™ controller and provide remote login, data logging, GEM/SECSII communications, and reliability reporting.
These spray solvent tools utilize precision spray nozzles to deliver a continuous, uniform shower of solvent or rinse water, which enhances process performance.
Trident SSTs increase productivity and uptime while significantly reducing cost of ownership — with system pricing that is significantly lower than competitive spray solvent tools.
See also:
Key Features
- 2-, 4-, or 6-tank models
- Wide range of rotors
- Windows®10-based Solaris controller
- Remote login, data logging, and GEM/SECSII
Major Benefits
- Significantly lower CoO
- Reduced chemical consumption
- Reduced defects
- Shorter process time
- Easier operation and control
Next-generation SST
The Trident™ Spray Solvent Tools (SST) from ClassOne Technology are the next generation of batch-processing systems for metal lift-off, photoresist strip, polymer removal, and other solvent-based processes.
For substrates up to 200mm
Trident Spray Solvent Tool models are available for up to 200mm substrates — with two, four, or six heated chemical tanks; and a wide range of rotors. ClassOne can accommodate a range of wafer sizes, engineering rotors for most shapes and sizes. These systems include ClassOne’s proven Windows®10-based Solaris™ controller and provide remote login, data logging, GEM/SECSII communications, and reliability reporting.
These spray solvent tools utilize precision spray nozzles to deliver a continuous, uniform shower of solvent or rinse water, which enhances process performance.
Trident SSTs increase productivity and uptime while significantly reducing cost of ownership — with system pricing that is significantly lower than competitive spray solvent tools.
