TRIDENT™ SRD Spin Rinse Dryer Batch Processing Systems
Delivering advanced SRD performance for 75-200mm Substrates
The Trident™ family of spin rinse dryers (SRDs) from ClassOne Technology is all new equipment providing state-of-the-art technology in cleaning and rinsing wafers after wet processing — rapidly and efficiently removing residual chemicals and drying substrates completely without leaving water spots.
The system’s non-contact heating results in cleaner nitrogen gas (N2) because it places a filter after the heater and eliminates direct contact between N2 and the heater. Trident SRDs also use ultra-pure valves and fittings throughout, and all systems include a comprehensive facility panel to precisely control all pressures and flows. These are typical of the design advances and efficiencies that give Trident its uniquely attractive performance-to-price value.
ClassOne’s easy to use Trident SRD tools are available in bench-top, roll-around single-stack and dual-stack configurations, for processing up to 50 substrates per batch. The system accommodates 75mm to 200mm wafers, depending upon the model, chamber size and rotor used.
Trident SRD Standard Specifications
- Quick-disconnect rotor (single bolt)
- Rotors included (customer selects size)
- LCD Color touch screen
- Direct drive brushless motor
- All stainless-steel cabinetry
- Emergency power off (EPO), front and rear
- Foot-activated door-open switch
- Deionized water recirculation saver
- Resistivity monitor controller and probe
- Data logger
- Heater alarm
- Over temperature protection
- Ultra-pure Teflon pneumatic valves, pillar fittings
- Drain-trap connection
- All stainless steel, easy-access panels
- CE-certified
Features
- Stainless steel cabinetry
- Negative-pressure motor seal
- Non-contact ultra-pure N2 heater
- Full-control facility panel
- Door-top DC ionizer
- Full wrap-around bowl heater
- PLC display with color touch screen
Benefits
- FM4910 compliance
- Much cleaner seal, reduced particles
- Cleaner N2
- Precise control of flows and pressures
- Reduced particles
- Optimum drying performance
- All components readily available
Options
- 50-wafer capacity bowl (to fit 2 cassettes)
- Substitute SS panel with FM4910 material
- Light tower with 3 indicator lamps R/Y/G
- Rear display
- Bulk mount
- Extended warranty (2 years)
Models
75mm-150mm models
- 2600: Single stack, tabletop model
- 4600: Single stack, roll-around model
- 8600: Dual stack
75mm-200mm models
- 2800: Single stack, tabletop model
- 4800: Single stack, roll-around model
- 8800: Dual stack
Chamber Options
- 50-wafer capacity bowl (to fit 2 cassettes)
- Low profile chamber for 75-150mm substrates
- Low profile chamber for 75-200mm substrates
- High profile chamber for 75-200mm substrates
The Trident™ family of spin rinse dryers (SRDs) from ClassOne Technology is all new equipment providing state-of-the-art technology in cleaning and rinsing wafers after wet processing — rapidly and efficiently removing residual chemicals and drying substrates completely without leaving water spots.
The system’s non-contact heating results in cleaner nitrogen gas (N2) because it places a filter after the heater and eliminates direct contact between N2 and the heater. Trident SRDs also use ultra-pure valves and fittings throughout, and all systems include a comprehensive facility panel to precisely control all pressures and flows. These are typical of the design advances and efficiencies that give Trident its uniquely attractive performance-to-price value.
ClassOne’s easy to use Trident SRD tools are available in bench-top, roll-around single-stack and dual-stack configurations, for processing up to 50 substrates per batch. The system accommodates 75mm to 200mm wafers, depending upon the model, chamber size and rotor used.
Trident SRD Standard Specifications
- Quick-disconnect rotor (single bolt)
- Rotors included (customer selects size)
- LCD Color touch screen
- Direct drive brushless motor
- All stainless-steel cabinetry
- Emergency power off (EPO), front and rear
- Foot-activated door-open switch
- Deionized water recirculation saver
- Resistivity monitor controller and probe
- Data logger
- Heater alarm
- Over temperature protection
- Ultra-pure Teflon pneumatic valves, pillar fittings
- Drain-trap connection
- All stainless steel, easy-access panels
- CE-certified
