High-Performance Single-Wafer Solutions
The Solstice platform provides a common, easy-to-use, high-performance flexible platform for many process technologies across electroplating and wet surface preparation processes.
Technologies by Process Application
Solstice
The Solstice platform provides a common, easy to use, high performance flexible platform for many process technologies across Electroplating and Wet Process.
The Solstice Max and Solstice S platforms provide high performance process technologies for surface prep and electroplating. SOlstice chambers seek to maximize performance to complexity + cost. In all the chamber technologies, unnecesary complexity common to competitors has been removed in favor of more elegant and intuitive designs. This allows for faster recipe dial in, longer up times, and lower burdens for operators and engineers.
Max Series
- Modular platform, extendible in the field
- 200mm and 300mm wafer capable
- From 2 to 16 chambers
S-Series
- Monolithic frame
- 3-inch to 200mm wafer capable
- From 2 to 8 chambers
- Smallest footprint













