Solstice SP4
Automated Surface Prep Systems
Advanced, single-wafer, high-throughput Surface Preparation and ECD – with up to four chambers
Smaller yet very powerful
The Solstice® SP4 systems are high-speed, fully-automated wet processing tools. With up to four chambers, they are designed for surface preparation processing as well as electrochemical deposition (ECD) specifically for ≤200mm wafers. The SP4 provides all the essential features and capabilities of the Solstice SP8, but with fewer chambers, a smaller footprint, and a lower price.
The SP4 can be well suited to users with simpler processing needs or lower volumes, or who require an economical entry point into automated single-wafer production with enhanced process control.
Four chambers for mid-level production
Permits up to 4 processing chambers
The SP4 is engineered to deliver class-leading performance and exceptional operational flexibility. The unique Solstice platform enables it to handle a broad spectrum of surface preparation wet processes, from high-pressure metal lift-off to UBM etch and much more – as well as electrochemical deposition (ECD) processes, if desired.
The system is designed to accommodate many different substrate types, both transparent and opaque, from very thin to bonded.
An easy entry point to full automation
Side view of the Solstice SP4
The Solstice gives wet bench users an easy and affordable upgrade path to the benefits of high-speed cassette-to-cassette automated processing – along with major improvements in quality, consistency, throughput, safety, and control.
The four chambers of this system may be configured with a mix of different specialized surface prep chambers, and ECD chambers, specified at the time of purchase.
All Solstice models share the same innovative high-performance chambers, software controls, and electronics. Each tool provides the same intuitive, touch-screen control, with GEM/SECSII interface, full reporting, and a great deal more.
See also:
KEY FEATURES
- Four chambers to enable multiple processes
- Cassette-to-cassette automation
- For 75mm to 200mm substrates
- Up to 75wph throughput
- Enables rapid diameter changes
- Automated recipe execution
- Handles thin or bonded, transparent or opaque substrates
- Covers very wide range of surface preparation processes
MAJOR BENEFITS
- SP8 capabilities, but with fewer chambers
- Smaller footprint, lower cost than SP8
- High processing rates, excellent throughput
- Exceptional quality surface preparation and ECD
- Special processing chambers can substantially reduce processing costs
- Superior process control and excellent uniformity
Smaller yet very powerful
The Solstice® SP4 systems are high-speed, fully-automated wet processing tools. With up to four chambers, they are designed for surface preparation processing as well as electrochemical deposition (ECD) specifically for ≤200mm wafers. The SP4 provides all the essential features and capabilities of the Solstice SP8, but with fewer chambers, a smaller footprint, and a lower price.
The SP4 can be well suited to users with simpler processing needs or lower volumes, or who require an economical entry point into automated single-wafer production with enhanced process control.
Four chambers for mid-level production
Permits up to 4 processing chambers
The SP4 is engineered to deliver class-leading performance and exceptional operational flexibility. The unique Solstice platform enables it to handle a broad spectrum of surface preparation wet processes, from high-pressure metal lift-off to UBM etch and much more – as well as electrochemical deposition (ECD) processes, if desired.
The system is designed to accommodate many different substrate types, both transparent and opaque, from very thin to bonded.
An easy entry point to full automation
Side view of the Solstice SP4
The Solstice gives wet bench users an easy and affordable upgrade path to the benefits of high-speed cassette-to-cassette automated processing – along with major improvements in quality, consistency, throughput, safety, and control.
The four chambers of this system may be configured with a mix of different specialized surface prep chambers, and ECD chambers, specified at the time of purchase.
All Solstice models share the same innovative high-performance chambers, software controls, and electronics. Each tool provides the same intuitive, touch-screen control, with GEM/SECSII interface, full reporting, and a great deal more.
Let’s Talk
We listen and respond to your unique challenges to provide the right technology at the right time and meet your manufacturing goals. Reach out, and we’ll deliver a solution.
