Ferdinand-Braun-Institut Chooses Solstice S4 for Advanced Electroplating and Wafer Surface Processing
ClassOne Technology | March 17, 2020
Kalispell, MT – ClassOne Technology, global supplier of advanced electroplating systems for ≤200mm wafer processing, announced the sale of its Solstice® S4 system to the Ferdinand-Braun-Institut (FBH) in Berlin. The FBH is a major III-V compound semiconductor research institute that develops leading-edge microwave and optoelectronic devices for communications, energy, health, mobility and other industries.
“We were looking for the right tool to optimize our metal lift-off processes, and we did a rigorous comparison of competitive equipment,” said Olaf Krüger, Head of FBH’s Process Technology Department. “The Solstice S4 came out the winner, with superior performance in comparison demos. And one strong differentiator was ClassOne’s unique face-down wafer processing design.”
“Our face-down processing has become a clear favorite in the compound semiconductor industry,” said Roland Seitz, Director of ClassOne’s European Operations. “It’s an elegant design that does the job better and also eliminates fundamental problems common in other tools. For example, it prevents re-adhesion issues. After metal fragments and cross-linked photoresist have been dislodged, gravity simply pulls them away from the wafer surface and down the chamber drain – leaving the wafer surface clean.”
Seitz explained that the Solstice S4’s compact footprint and its configuration and multi-processing flexibility were additional factors in the purchase decision – as well as FBH’s experience with ClassOne’s other equipment and customer support, since FBH is a repeat customer. Seitz noted that with the addition of the S4, FBH’s Berlin facility will now be employing virtually the entire portfolio of ClassOne tools, including the Solstice S8 as well as SAT, SST, and SRD systems.
ClassOne’s Solstice platform includes three complementary configurations: The 8-chambered Solstice S8 with up to 75-wph throughput, the 4-chambered automated Solstice S4, and the 2-chambered Solstice LT for process development. In addition to electroplating, the Solstice’s special Plating-Plus™ capabilities enable it to handle numerous other functions, including wafer cleaning, high-pressure metal lift-off, resist strip, UBM etch and more. This multi-processing flexibility often reduces the number of different tools a user needs to purchase.
About ClassOne Technology
ClassOne Technology (classone.com) headquartered in Kalispell, Montana, has become known for delivering “Advanced Plating for ≤200mm Processing.” In addition to electroplating systems, the company also provides complementary wet processing equipment such as spin rinse dryers, spray acid tools, spray solvent tools, and more. All are designed to provide advanced technology processing equipment at attractive prices to compound semiconductor manufacturers and other emerging markets who have been underserved by the larger equipment makers. ClassOne Technology is built upon decades of experience from industry veterans creating high-performance semiconductor equipment. ClassOne Technology is a sister company to ClassOne Equipment (ClassOneEquipment.com), long respected as the industry’s premier provider of refurbished name-brand processing tools, with over 2,500 systems installed worldwide.
The Ferdinand-Braun-Institut, Leibniz-Institut fuer Hoechstfrequenztechnik (FBH), is based in Berlin and researches electronic and optical components, modules and systems based on compound semiconductors, for communications, energy, health, mobility, and other industries. FBH develops such next-generation light sources as high-power diode lasers, UV light sources and hybrid laser modules. Applications range from medical technology, precision metrology and sensors to optical communications in space and integrated quantum technology. In microwaves, FBH develops high-efficiency multi-functional power amplifiers and millimeter wave frontends targeting energy-efficient mobile communications, industrial sensing and imaging as well as car safety systems. In addition, FBH produces compact atmospheric microwave plasma sources with energy-efficient low-voltage drivers and laser drivers for a range of applications.